Force State RF Generator is Capable of Driving various ICP, CCP, Sputtering, PECVD Vacuum Chamber, and Atmospheric Plasma.
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State-of-the-Art Technology
RF Power Supply, Oxygen Plasma/Selected Gas Plasma System
- Flow Rang 10 ccm to 30 SLM - Accuracy: +-1% Full Scale - Repeatability: 0.25% of rate - Leak Integrity: 10 exp-9 ATM cc/sec
Brooks 5850E D-Type
$1,300.00 一般價格
$1,200.00促銷價格
Brooks 5850 E D-Type Type: Elastomer Seal Mass Flow Controller Mass Flow Meter Full Scale Capacity3 sccm - 30 slpm Max Pressure 100 bar/1500 psig Max Temp65 C/150 F Accuracy 1% FS Input/Output0-5 Vdc