AuroraTM Oxygen/Selected Gas Plasma System OP-300
Features:
RF Generator for wider treated materials selection and superior efficiency versus DC Plasma.
Inductively Coupled Plasma
Reactive Gas: O2, N2, H2….
Real Time Impedance Auto-matching
PID heater: For atmospheric plasma (optional)
Multiple Memory Settings
Treated Materials:
BIO-MEMS Materials: Cellulose, Cuprophane, PC, PDMS, PE, PET, PGA, PLA, PHEMA, PMMA, PP, PTFE, PVC, Teflon, UHMPE,
Other polymeric materials: Plastics, Resins, Polymers, Parylene,
Metal: Ti-Alloy, Ti-Ni, Co-Cr
Aurora Oxygen /Selected Gas Plasma System OP-300
$38,000.00價格
- Aurora Oxygen/Selected Gas Plasma OP-300
Model V: Integrated One Set Design(space savings) Front Opening Chamber
Dimension (WxDxH): 465 X 600 X 690 mm
Weight: about 80 kg (including RF Power Supply)
Model H: Individual Chamber (for clean room and negative pressure environments)
- Model H-FO: Front Door Opening Chamber
- Model H-TO: Top Door Opening Chamber
Dimension (WxDxH): 535 X 435 X 420 mm
Weight: about 43 kg
System Specification
1. RF Power Supply
Input: AC90V-240V,50-60HZ,6A
RF Output Power: MAX 200W (Standard) ; MAX 100 W (Mini)
Conforms to FCC and CE.
Frequency:13.56MHZ +/- 50PPM
Power Range Adjustment: continuous 1 W to 200 W
Output Impedance:3ohm to 50ohm
PID Temperature Control: Source Constant heating
Real Time Auto-matching (up to 1,000 W)(1.5 KW Optional)
Air Cooling
Main Gas Flow Range: 0-30 SLM
Reactive Gas Flow Range: 0-5 SLM
Connector: 6 mm or 1/4 inch Speed connector
Dimension (WxDxH): 482 X 560 X 202 mm
Weight: about 36 kg.
2. Vacuum Chamber
Chamber Size: Diameter = 250 mm, Depth =220 mm
Lower Pressure Limit: 20 mTorr
3.Vacuum Gauge Controller plus Pirani Vacuum Gauge Sensor
- Digital Display (1 X 10 exp－3 to 9.9 X 10 exp2 Torr)
- Bright Green LED Display
- Full Range 90 to 260 V AC Power Input 90-260 V
Accessories
Bellows, Center rings, and clamps
Rotary Pump: 150 Liter/min or equivalent